SentioProber#
The SENTIO prober class allows you to control a SENTIO compatible probe station. This is an extension to the Prober interface that adds commands required for using SENTIO specific SiPh commands.
All members and functions of the class Prober are also available for this class.
method GetSiphPositioner(locationString: string)#
Gets the SiPh positioner at the specified location.
Parameters#
| Name | Description |
|---|---|
| locationString | The location of the positioner. (East, West, North, South) |
Returns#
| Type | Description |
|---|---|
| SentioSiphPositioner | The SiPh positioner object. |
Example#
probe_station = measmatic.GetDevice('device-probe-station')
siph_positioner_east = probe_station.GetSiphPositioner("East")
method GetSiphPositioner(locationInt: int)#
Gets the SiPh positioner at the specified location.
Parameters#
| Name | Description |
|---|---|
| locationInt | An integer value representing the location of the positioner. (East = 1, West = 2, North = 3, South = 4) |
Returns#
| Type | Description |
|---|---|
| SentioSiphPositioner | The SiPh positioner object. |
Example#
probe_station = measmatic.GetDevice('device-probe-station')
siph_positioner_west = probe_station.GetSiphPositioner(2)
method HasSiphPositioner(location: int)#
Checks whether a SiPh positioner is installed at a certain probe position.
Parameters#
| Name | Description |
|---|---|
| location | An integer value representing the location of the positioner. (East = 1, West = 2, North = 3, South = 4) |
Returns#
| Type | Description |
|---|---|
| bool | True if a SiPh positioner is installed and set up at the given location, otherwise False . |
Example#
probe_station = measmatic.GetDevice('device-probe-station')
has_siph_positioner = probe_station.HasSiphPositioner(1)
method HasSiphPositioner(location: string)#
Checks whether a SiPh positioner is installed at a certain probe position.
Parameters#
| Name | Description |
|---|---|
| location | A string representing the position of the probe. ("East", "West", "North", "South") The submitted strings are not case sensitive. |
Returns#
| Type | Description |
|---|---|
| bool | True if a SiPh positioner is installed and set up at the given location, otherwise False . |
Example#
probe_station = measmatic.GetDevice('device-probe-station')
has_siph_positioner = probe_station.HasSiphPositioner('East')
method MoveAllSiphPositionerHover()#
Move all motorized Siph positioner to their hover height. The hover height is a height close to the wafer contact height but below the separation height. Chuck x-y motion speeds are limited when probes are at hover height and it is not recommended to move the chuck across large distances.(Hover height is usually ~50 µm above contact)
Example#
probe_station = measmatic.GetDevice('device-probe-station')
probe_station.MoveAllSiphPositionerHover()
method MoveAllSiphPositionerSeparation()#
Move all motorized Siph positioner to their separation height. The separation height is a probe station specific height set up to allow safe chuck x-y motion across the entire wafer. (Usually 250 µm above contact)
Example#
probe_station = measmatic.GetDevice('device-probe-station')
probe_station.MoveAllSiphPositionerHover()